{"product_id":"advanced-lithography-9781632380166","title":"Advanced Lithography","description":"\u003cp\u003e • Author(s): Burton Kohler\u003cbr\u003e • Publisher: NY Research Press\u003cbr\u003e • Publisher Imprint: NY Research Press\u003cbr\u003e • BISAC: Materials Science - General\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThis book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for carrying out specific functions in the devices for applications. They are formed as a result of execution of numerous techniques like stereo-lithography, sputtering, colloid lithography, deposition, dry etching, etc. This book provides the readers with valuable information about nano structure, 3D structure, nano-lithography, and elucidates the methodology, techniques and applications of nano-lithography.\u003c\/p\u003e","brand":"NY Research Press","offers":[{"title":"Hardcover","offer_id":45412033462423,"sku":"9781632380166","price":8913.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781632380166.webp?v=1767150302","url":"https:\/\/atlanticbooks.com\/products\/advanced-lithography-9781632380166","provider":"Atlantic Books","version":"1.0","type":"link"}