{"product_id":"advanced-metallization-conference-1999-amc-1999-volume-15-9781558995390","title":"Advanced Metallization Conference 1999 (AMC 1999): Volume 15","description":"\u003cp\u003e • Author(s): Mihal E. Gross | Thomas Gessner | N. Kobayashi\u003cbr\u003e • Publisher: Materials Research Society\u003cbr\u003e • Publisher Imprint: Materials Research Society\u003cbr\u003e • BISAC: Electronics - Circuits - General\u003c\/p\u003e\u003cp\u003eThe revolution in materials and processes for IC metallization presents exciting challenges for the future. This book, the 16th in a popular series from MRS, provides a forum within the IC metallization community, across industrial, academic and government institutions, for presentation and discussion of leading-edge research, development and technology. In particular, the volume focuses on Cu and low-k dielectrics spanning materials, properties, processing, integration and reliability. Two keynote addresses are featured - one on 'The MARCO\/DARPA Interconnect Focus Cente' a cooperative research program involving several top universities in the U.S. whose mission it is to explore new interconnect strategies for the future, the other on 'Low-Cost and High-Performance DRAM Technology'. Additional topics include: integration of damascene architectures; copper-deposition processes and properties; barriers for copper; low-k dielectrics; aluminum, tungsten and DRAM metallization; silicides; CMP\/cleaning\/etching; process modeling and reliability.\u003c\/p\u003e","brand":"Materials Research Society","offers":[{"title":"Hardcover","offer_id":47813632458903,"sku":"9781558995390","price":3134.0,"currency_code":"INR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781558995390.webp?v=1778337312","url":"https:\/\/atlanticbooks.com\/products\/advanced-metallization-conference-1999-amc-1999-volume-15-9781558995390","provider":"Atlantic Books","version":"1.0","type":"link"}