{"product_id":"atomic-layer-deposition-principles-characteristics-and-nanotechnology-applications-9781118062777","title":"Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications","description":"\u003cp\u003e • Author(s): Tommi Kaariainen\u003cbr\u003e • Publisher: Wiley-Scrivener\u003cbr\u003e • Publisher Imprint: Wiley-Scrivener\u003cbr\u003e • BISAC: Materials Science - Thin Films, Surfaces \u0026amp; Interfaces\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eSince the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.\u003c\/p\u003e","brand":"Wiley-Scrivener","offers":[{"title":"Hardcover","offer_id":45203980550295,"sku":"9781118062777","price":20431.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781118062777.webp?v=1767308350","url":"https:\/\/atlanticbooks.com\/products\/atomic-layer-deposition-principles-characteristics-and-nanotechnology-applications-9781118062777","provider":"Atlantic Books","version":"1.0","type":"link"}