{"product_id":"bionanofluidic-mems-9780387462813","title":"Bionanofluidic Mems","description":"\u003cp\u003e • Author(s): Peter J. Hesketh\u003cbr\u003e • Publisher: Springer Verlag\u003cbr\u003e • Publisher Imprint: Springer V\u003cbr\u003e • Subject: Engineering\u003cbr\u003e • BISAC: Nanotechnology \u0026amp; MEMS\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003e\u003cb\u003eFrom the Back Cover\u003c\/b\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp\u003eBioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: \u003cbr\u003e\u003c\/p\u003e \u003cul\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eBioNanoFluidic MEMS connection between the interdisciplinary nature of\u003cbr\u003eBioNanoFluidics and MEMS\u003cbr\u003e \u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eBioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp\u003e\u003c\/p\u003e \u003cul\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eHands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp\u003e\u003c\/p\u003e \u003cul\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eInterconnection between the interdisciplinary nature of BioNanoFluidics and MEMS\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp\u003e\u003c\/p\u003e \u003cul\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eBioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies\u003cbr\u003e\n\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eDiscussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp\u003e\u003c\/p\u003e \u003cul\u003e \u003cp\u003e \u003c\/p\u003e\n\u003cli\u003eSelected coverage of Nano\/Microfabrication, Nano Manufacturing and Nano\/Micro Integration\u003cbr\u003e\n\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp\u003e\"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated\u003cbr\u003esubstrate to create sensors, actuators, and microsystems. This series, authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner.\"\u003c\/p\u003e \u003cp\u003e\u003c\/p\u003e \u003cp\u003eSTEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus\u003c\/p\u003e \u003cp\u003e\u003c\/p\u003e","brand":"Springer Verlag","offers":[{"title":"Hardcover","offer_id":45091102982295,"sku":"9780387462813","price":10915.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780387462813.webp?v=1767267492","url":"https:\/\/atlanticbooks.com\/products\/bionanofluidic-mems-9780387462813","provider":"Atlantic Books","version":"1.0","type":"link"}