{"product_id":"chemical-processing-of-dielectrics-insulators-and-electronic-ceramics-volume-606-9781107413207","title":"Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606","description":"\u003cp\u003e • Author(s): Anthony C. Jones | Janice Veteran | Donald Mullin\u003cbr\u003e • Publisher: Cambridge University Press\u003cbr\u003e • Publisher Imprint: Cambridge University Press\u003cbr\u003e • BISAC: Electronics - General\u003c\/p\u003e\u003cp\u003eThis book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics..\u003c\/p\u003e","brand":"Atlantic Books","offers":[{"title":"Paperback","offer_id":46469458657431,"sku":"9781107413207","price":3603.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781107413207.jpg?v=1766221336","url":"https:\/\/atlanticbooks.com\/products\/chemical-processing-of-dielectrics-insulators-and-electronic-ceramics-volume-606-9781107413207","provider":"Atlantic Books","version":"1.0","type":"link"}