{"product_id":"cmos-gate-stack-scaling-materials-interfaces-and-reliability-implications-volume-1155-9781107408326","title":"CMOS Gate-Stack Scaling Materials, Interfaces and Reliability Implications: Volume 1155","description":"\u003cp\u003e • Author(s): Alexander A. Demkov | Bill Taylor | H. Rusty Harris\u003cbr\u003e • Publisher: Cambridge University Press\u003cbr\u003e • Publisher Imprint: Cambridge University Press\u003cbr\u003e • BISAC: Materials Science - General\u003c\/p\u003e\u003cp\u003eTo address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k\/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.\u003c\/p\u003e","brand":"Atlantic Books","offers":[{"title":"Paperback","offer_id":46488918524055,"sku":"9781107408326","price":3450.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781107408326.jpg?v=1766339875","url":"https:\/\/atlanticbooks.com\/products\/cmos-gate-stack-scaling-materials-interfaces-and-reliability-implications-volume-1155-9781107408326","provider":"Atlantic Books","version":"1.0","type":"link"}