{"product_id":"electroceramic-based-mems-fabrication-technology-and-applications-9780387233109","title":"Electroceramic-Based MEMS: Fabrication-Technology and Applications","description":"\u003cp\u003e • Author(s): Nava Setter\u003cbr\u003e • Publisher: Springer\u003cbr\u003e • Publisher Imprint: Springer\u003cbr\u003e • BISAC: Electronics - Microelectronics\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003e\u003cb\u003eFrom the Back Cover\u003c\/b\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp\u003eThe book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: \u003c\/p\u003e \u003cp\u003ePart A: Applications and devices with electroceramic-based MEMS: \u003c\/p\u003e \u003cp\u003eChemical microsensors \u003c\/p\u003e \u003cp\u003eMicroactuators based on thin films \u003c\/p\u003e \u003cp\u003eMicromachined ultrasonic transducers \u003c\/p\u003e \u003cp\u003eThick-film piezoelectric and magnetostrictive devices \u003c\/p\u003e \u003cp\u003ePyroelectric microsystems \u003c\/p\u003e \u003cp\u003eRF bulk acoustic wave resonators and filters \u003c\/p\u003e \u003cp\u003eHigh frequency tunable devices\u003c\/p\u003e \u003cp\u003eMEMS for optical functionality \u003c\/p\u003e \u003cp\u003ePart B: Materials, fabrication technology, and functionality: \u003c\/p\u003e \u003cp\u003eCeramic thick films for MEMS \u003c\/p\u003e \u003cp\u003ePiezoelectric thin films for MEMS\u003c\/p\u003e \u003cp\u003eMaterials and technology in thin films for tunable high frequency devices \u003c\/p\u003e \u003cp\u003ePermittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics \u003c\/p\u003e \u003cp\u003eMicrofabrication of piezoelectric MEMS \u003c\/p\u003e \u003cp\u003eNano patterning methods for electroceramics\u003c\/p\u003e \u003cp\u003eSoft lithography emerging techniques \u003c\/p\u003e \u003cp\u003eThe book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and\/or interested in this fast growing and highly promising field.\u003c\/p\u003e \u003cp\u003eThe publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.\u003c\/p\u003e","brand":"Springer","offers":[{"title":"Hardcover","offer_id":45275071348887,"sku":"9780387233109","price":14056.0,"currency_code":"INR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780387233109.webp?v=1769281809","url":"https:\/\/atlanticbooks.com\/products\/electroceramic-based-mems-fabrication-technology-and-applications-9780387233109","provider":"Atlantic Books","version":"1.0","type":"link"}