{"product_id":"handbook-of-chemicals-and-gases-for-the-semiconductor-industry-9780471316718","title":"Handbook of Chemicals and Gases for the Semiconductor Industry","description":"\u003cp\u003e • Author(s): Ashutosh Misra\u003cbr\u003e • Publisher: Wiley-Interscience\u003cbr\u003e • Publisher Imprint: Wiley-Interscience\u003cbr\u003e • BISAC: Chemical \u0026amp; Biochemical\u003c\/p\u003e\u003cp\u003e\u003cb\u003eThe first comprehensive guide to the chemicals and gases used in semiconductor manufacturing\u003c\/b\u003e \u003c\/p\u003e\u003cp\u003eThe fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. \u003ci\u003eThe Handbook of Chemicals and Gases for the Semiconductor Industry\u003c\/i\u003e meets this need.\u003c\/p\u003e \u003cp\u003eEach of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number.\u003c\/p\u003e \u003cp\u003e\u003cb\u003eThe Handbook's eight chapters are:\u003c\/b\u003e\u003cbr\u003eThin Film Deposition Materials\u003cbr\u003eWafer Cleaning Materials\u003cbr\u003ePhotolithography Materials\u003cbr\u003eWet and Dry Etching Materials\u003cbr\u003eChemical Mechanical Planarizing Methods\u003cbr\u003eCarrier Gases\u003cbr\u003eUncategorized Materials\u003cbr\u003eSemiconductor Chemicals Analysis\u003c\/p\u003e \u003cp\u003eNo other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The \u003ci\u003eHandbook of Chemicals and Gases for the Semiconductor Industry\u003c\/i\u003e will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.\u003c\/p\u003e","brand":"Wiley-Interscience","offers":[{"title":"Hardcover","offer_id":45203895222423,"sku":"9780471316718","price":19020.0,"currency_code":"INR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780471316718.webp?v=1767668463","url":"https:\/\/atlanticbooks.com\/products\/handbook-of-chemicals-and-gases-for-the-semiconductor-industry-9780471316718","provider":"Atlantic Books","version":"1.0","type":"link"}