{"product_id":"handbook-of-silicon-based-mems-materials-and-technologies-9780128177860","title":"Handbook of Silicon Based MEMS Materials and Technologies","description":"\u003cp\u003e • Author(s): Markku Tilli\u003cbr\u003e • Publisher: Elsevier\u003cbr\u003e • Publisher Imprint: Elsevier\u003cbr\u003e • BISAC: Materials Science - General\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003e\u003ci\u003eHandbook of Silicon Based MEMS Materials and Technologies, Third Edition\u003c\/i\u003e is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS.\u003cb\u003e \u003c\/b\u003eThe book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures.\u003c\/p\u003e \u003cp\u003eThe third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. \u003c\/p\u003e","brand":"Elsevier","offers":[{"title":"Paperback","offer_id":45310487494807,"sku":"9780128177860","price":17388.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780128177860.webp?v=1769288025","url":"https:\/\/atlanticbooks.com\/products\/handbook-of-silicon-based-mems-materials-and-technologies-9780128177860","provider":"Atlantic Books","version":"1.0","type":"link"}