{"product_id":"handbook-of-silicon-semiconductor-metrology-9780367397166","title":"Handbook of Silicon Semiconductor Metrology","description":"\u003cp\u003e • Author(s): Alain C. Diebold\u003cbr\u003e • Publisher: Taylor \u0026amp; Francis\u003cbr\u003e • Publisher Imprint: CRC Press\u003cbr\u003e • BISAC: Electronics - Semiconductors\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eContaining more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.\u003c\/p\u003e","brand":"Taylor \u0026 Francis","offers":[{"title":"Paperback","offer_id":45239913414807,"sku":"9780367397166","price":5810.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780367397166.webp?v=1769223951","url":"https:\/\/atlanticbooks.com\/products\/handbook-of-silicon-semiconductor-metrology-9780367397166","provider":"Atlantic Books","version":"1.0","type":"link"}