{"product_id":"lpcvd-silicon-nitride-and-oxynitride-films-material-and-applications-in-integrated-circuit-technology-9783540539544","title":"Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology","description":"\u003cp\u003e • Author(s): F. H. P. M. Habraken\u003cbr\u003e • Publisher: Springer\u003cbr\u003e • Publisher Imprint: Springer\u003cbr\u003e • BISAC: Electronics - Microelectronics\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThis volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.\u003c\/p\u003e","brand":"Springer","offers":[{"title":"Paperback","offer_id":45280930005143,"sku":"9783540539544","price":3672.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9783540539544.webp?v=1769297729","url":"https:\/\/atlanticbooks.com\/products\/lpcvd-silicon-nitride-and-oxynitride-films-material-and-applications-in-integrated-circuit-technology-9783540539544","provider":"Atlantic Books","version":"1.0","type":"link"}