{"product_id":"micro-electro-mechanical-system-mems-technology-for-multifaceted-applications-9789819661619","title":"Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications","description":"\u003cp\u003e • Author(s): Kamaljeet Singh | Ayan Karmakar\u003cbr\u003e • Publisher: Springer\u003cbr\u003e • Publisher Imprint: Springer\u003cbr\u003e • BISAC: Mechanical\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eRole of contamination.- Wafer Criteria.- Micromachined Sensors: An overview.- Fabrication.- Thin film stress.- Micro devices: Planar Heater.- Critical aspects.\u003c\/p\u003e","brand":"Springer","offers":[{"title":"Hardcover","offer_id":47658039771287,"sku":"9789819661619","price":11752.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9789819661619.webp?v=1775816569","url":"https:\/\/atlanticbooks.com\/products\/micro-electro-mechanical-system-mems-technology-for-multifaceted-applications-9789819661619","provider":"Atlantic Books","version":"1.0","type":"link"}