{"product_id":"micro-electronic-and-mechanical-systems-9789533070278","title":"Micro Electronic and Mechanical Systems","description":"\u003cp\u003e • Author(s): Kenichi Takahata\u003cbr\u003e • Publisher: Intechopen\u003cbr\u003e • Publisher Imprint: Intechopen\u003cbr\u003e • BISAC: Electronics - General\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThis book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.\u003c\/p\u003e","brand":"Intechopen","offers":[{"title":"Hardcover","offer_id":45570625142935,"sku":"9789533070278","price":17414.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9789533070278.webp?v=1767465845","url":"https:\/\/atlanticbooks.com\/products\/micro-electronic-and-mechanical-systems-9789533070278","provider":"Atlantic Books","version":"1.0","type":"link"}