{"product_id":"microsystems-dynamics-9789048197002","title":"Microsystems Dynamics","description":"\u003cp\u003e • Author(s): Vytautas Ostasevicius\u003cbr\u003e • Publisher: Springer\u003cbr\u003e • Publisher Imprint: Springer\u003cbr\u003e • BISAC: Nanotechnology \u0026amp; MEMS\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eForeword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems;;Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator; Numerical Modeling and Analysis of Fluidic-Structural Interaction; Numerical Modeling and Analysis of Electrostatic-Structural Interaction; Numerical Modeling and Analysis of Vibro-Impact Interaction; Numerical Analysis of the Micromotor; Finite Element Modeling of Micromotor; Modal Analysis; Micromotor Control; Analytical Model of a Micromotor; Basics of Micromotor Geometry; Torque Analysis; Micromotor Design Guidelines; References\u003c\/p\u003e","brand":"Springer","offers":[{"title":"Hardcover","offer_id":45034255941783,"sku":"9789048197002","price":7267.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9789048197002.webp?v=1767262344","url":"https:\/\/atlanticbooks.com\/products\/microsystems-dynamics-9789048197002","provider":"Atlantic Books","version":"1.0","type":"link"}