{"product_id":"plasma-etching-fundamentals-and-applications-9780198562870","title":"Plasma Etching: Fundamentals and Applications","description":"\u003cp\u003e • Author(s): Minoru Sugawara | M. Sugawara | Barry L. Stansfield\u003cbr\u003e • Publisher: OUP Oxford\u003cbr\u003e • Publisher Imprint: OUP Oxford\u003cbr\u003e • BISAC: Electricity\u003c\/p\u003e\u003cp\u003eThis book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.\u003c\/p\u003e","brand":"OUP Oxford","offers":[{"title":"Hardcover","offer_id":47591379435671,"sku":"9780198562870","price":24949.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780198562870.webp?v=1774972735","url":"https:\/\/atlanticbooks.com\/products\/plasma-etching-fundamentals-and-applications-9780198562870","provider":"Atlantic Books","version":"1.0","type":"link"}