{"product_id":"polysulfones-as-x-ray-resists-9783639166484","title":"Polysulfones as X-Ray Resists","description":"\u003cp\u003e • Author(s): Gina Calderon Wilkinson\u003cbr\u003e • Publisher: VDM Verlag\u003cbr\u003e • Publisher Imprint: VDM Verlag\u003cbr\u003e • BISAC: Chemistry - Physical \u0026amp; Theoretical\u003c\/p\u003e\u003cp\u003eThe microlithographic process, essential in the fabrication of microdevices, uses high-energy radiation to transfer a pattern onto a thin film of polymer resist. Pattern transfer occurs by modifying the properties (solubility or volatility) of the polymer film exposed to radiation. Poly(olefin sulfones) exhibit a high sensitivity to x-rays, which is a desirable property for polymer resists used in the microlithographic process. The potential utility of these new resins prompted a study of the mechanism of degradation promoted by x- ray radiation. In this study, the effect of x-ray radiation on polysulfones with varied chemical structures was analyzed using x-ray absorption near- edge structure (XANES) spectroscopy and in-situ mass spectroscopy (MS). Interesting differences in the mode of degradation of certain poly(olefin sulfones) was observed. The results provide important groundwork for further studies of polysulfones as x- ray resists.\u003c\/p\u003e","brand":"VDM Verlag","offers":[{"title":"Paperback","offer_id":47609800458391,"sku":"9783639166484","price":4507.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9783639166484.webp?v=1775060263","url":"https:\/\/atlanticbooks.com\/products\/polysulfones-as-x-ray-resists-9783639166484","provider":"Atlantic Books","version":"1.0","type":"link"}