{"product_id":"run-to-run-control-in-semiconductor-manufacturing-9780849311789","title":"Run-to-Run Control in Semiconductor Manufacturing","description":"\u003cp\u003e • Author(s): James Moyne | Enrique Del Castillo | Arnon M. Hurwitz\u003cbr\u003e • Publisher: CRC Press\u003cbr\u003e • Publisher Imprint: CRC Press\u003cbr\u003e • BISAC: Electronics - Semiconductors\u003c\/p\u003e\u003cp\u003eRun-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine \"runs,\" thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.\u003c\/p\u003e","brand":"CRC Press","offers":[{"title":"Hardcover","offer_id":48057704218775,"sku":"9780849311789","price":26219.0,"currency_code":"INR","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9780849311789.webp?v=1784897609","url":"https:\/\/atlanticbooks.com\/products\/run-to-run-control-in-semiconductor-manufacturing-9780849311789","provider":"Atlantic Books","version":"1.0","type":"link"}