{"product_id":"semiconductor-strain-metrology-principles-and-applications-9781608055548","title":"Semiconductor Strain Metrology: Principles and Applications","description":"\u003cp\u003e • Author(s): Terence K. S. Wong\u003cbr\u003e • Publisher: Bentham Science Publishers\u003cbr\u003e • Publisher Imprint: Bentham Science Publishers\u003cbr\u003e • BISAC: Applied Sciences\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThis book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.\u003c\/p\u003e","brand":"Bentham Science Publishers","offers":[{"title":"Paperback","offer_id":45546927784087,"sku":"9781608055548","price":9069.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781608055548.webp?v=1767127062","url":"https:\/\/atlanticbooks.com\/products\/semiconductor-strain-metrology-principles-and-applications-9781608055548","provider":"Atlantic Books","version":"1.0","type":"link"}