{"product_id":"silicon-semiconductor-technology-processing-and-integration-of-microelectronic-devices-9783658410407","title":"Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices","description":"\u003cp\u003e • Author(s): Ulrich Hilleringmann\u003cbr\u003e • Publisher: Springer Verlag\u003cbr\u003e • Publisher Imprint: Springer\u003cbr\u003e • Subject: Engineering\u003cbr\u003e • BISAC: Electronics - Semiconductors\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003e\u003cb\u003eFrom the Back Cover\u003c\/b\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp\u003eThe book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.\u003c\/p\u003e\u003cbr\u003eThe Content\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003eWafer fabrication\u003c\/li\u003e\n\u003cli\u003eThermal oxidation\u003c\/li\u003e\n\u003cli\u003eLithography\u003c\/li\u003e\n\u003cli\u003eEtching technology\u003c\/li\u003e\n\u003cli\u003eDoping techniques\u003c\/li\u003e\n\u003cli\u003eChemical and Physical Deposition\u003c\/li\u003e\n\u003cli\u003eMetallization and Contacts\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e\u003c\/p\u003e \u003cbr\u003e\u003cb\u003eAbout the Author\u003c\/b\u003e\u003cb\u003eProf. Dr.-Ing. Ulrich Hilleringmann \u003c\/b\u003ehas been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989\u003cp\u003e\u003c\/p\u003e\u003cbr\u003e","brand":"Springer","offers":[{"title":"Paperback","offer_id":45275085373591,"sku":"9783658410407","price":4730.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9783658410407.webp?v=1769281884","url":"https:\/\/atlanticbooks.com\/products\/silicon-semiconductor-technology-processing-and-integration-of-microelectronic-devices-9783658410407","provider":"Atlantic Books","version":"1.0","type":"link"}