{"product_id":"updates-in-advanced-lithography-9789535111757","title":"Updates in Advanced Lithography","description":"\u003cp\u003e • Author(s): Sumio Hosaka\u003cbr\u003e • Publisher: Intechopen\u003cbr\u003e • Publisher Imprint: Intechopen\u003cbr\u003e • BISAC: Physics - Condensed Matter\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eAdvanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.\u003c\/p\u003e","brand":"Intechopen","offers":[{"title":"Hardcover","offer_id":45560920178839,"sku":"9789535111757","price":13112.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9789535111757.webp?v=1767464996","url":"https:\/\/atlanticbooks.com\/products\/updates-in-advanced-lithography-9789535111757","provider":"Atlantic Books","version":"1.0","type":"link"}