{"product_id":"users-guide-for-rm-8096-and-8097-the-mems-5-in-1-2013-edition-9781499211931","title":"User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition","description":"\u003cp\u003e • Author(s): U. S. Department of Commerce\u003cbr\u003e • Publisher: Createspace Independent Publishing Platform\u003cbr\u003e • Publisher Imprint: Createspace Independent Publishing Platform\u003cbr\u003e • BISAC: General\u003c\/p\u003e\u003cp\u003e\u003c\/p\u003e\u003cp\u003eThe Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.\u003c\/p\u003e","brand":"Createspace Independent Publishing Platform","offers":[{"title":"Paperback","offer_id":45512118435991,"sku":"9781499211931","price":1866.0,"currency_code":"INR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0666\/3471\/1191\/files\/9781499211931.webp?v=1767172657","url":"https:\/\/atlanticbooks.com\/products\/users-guide-for-rm-8096-and-8097-the-mems-5-in-1-2013-edition-9781499211931","provider":"Atlantic Books","version":"1.0","type":"link"}