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Introduction to Microlithography

by Larry F. Thompson , C. Grant Willson , Murrae J. Bowden
Save 17% Save 17%
Current price ₹18,247.00
Original price ₹21,897.00
Original price ₹21,897.00
Original price ₹21,897.00
(-17%)
₹18,247.00
Current price ₹18,247.00

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Book cover type: Hardcover
  • ISBN13: 9780841228481
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: American Chemical Society
  • Publisher Imprint: American Chemical Society
  • Publication Date:
  • Pages: 540
  • Original Price: GBP 127.5
  • Language: English
  • Edition: Second
  • Item Weight: 858 grams
  • BISAC Subject(s): Chemistry / Organic

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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