Kryo-Vakuumtechnik: Grundlagen Und Anwendungen
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Der Kryo-Vakuumtechnik, der Vakuumerzeugung durch Ailwendungbefer Tempera- turen, wurde bisher in den vakuumtechnischen Lehrbiichern ein nur bescheidener Raum zugemessen. In den letzten J ahren haben aber die Bedeutung des Kryopum- pens und der Stoff dieses Gebietes so stark zugenommen, daB eine eigene, von der konventionellen Vakuumtechnik losgeloste Darstellung erwiinscht schien. Die vor- liegende Monographie iiber die physikalischen Grundlagen, die praktisehen Aus- fiihrungsformen und Anwendungen der Kryo-Vakuumtechnik entstand im Zusammen- hang mit einer langjahrigen Tatigkeit des Verfassers auf diesem Spezialgebiet in Industrie und Forsehung. Bekanntlieh waehst der Bedarf an Hoehvakuumpumpen standig, einmal als Folge neuer Anwendungsgebiete, zum anderen wegen der bei vielen Vakuumverfahren er- hobenen Forderungen nach einer sauberen, von Kohlenwasserstoffen freien Restgas- atmosphare, einem niedrigen Enddruck und - mit Riieksieht auf eine mogliehst kur- ze Pumpzeit - einem hohen spezifischen (auf die Pumpeneintrittsflaehe bezogenen) Saugvermogen. In diesen Eigenschaften sind Kryopumpen allen konventionellen Hoehvakuumpumpen iiberlegen. Die Ausfiihrungsformen der Kryopumpen bieten eine reiehe Auswahl: Sie stehen zur Verfiigung sowohl als mit fliissigem Helium gekiihlte Kiihlfallen (Bad-Kryopumpen) als aueh als Kryopanel, die kontinuierlich dureh einen Heliumstrom, regenerative Refrigeratoren oder Refrigeratoren mit Joule-Thomson-Ventilen oder Expansionse- jektoren gekiihlt werden. Trotz aller Unterschiede dieser Kiihlmethoden besteht eine groI3e Flexibilitat hinsichtlich der konstruktiven Gestaltung der pumpenden Kryo- flache, die stets an den zu evakuierenden Raum angepaBt werden kann. Auf diese Weise kann das volle Saugvermogen dort wirksam werden, wo es gebraueht wir- selbst an schwer zuganglichen Ste-llen ein( r Apparatur.
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