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Manufacturing Techniques for Microfabrication and Nanotechnology

by Marc J. Madou
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Current price ₹10,129.00
Original price ₹14,469.00
Original price ₹14,469.00
Original price ₹14,469.00
(-30%)
₹10,129.00
Current price ₹10,129.00

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Book cover type: Hardcover
  • ISBN13: 9781420055191
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Taylor & Francis
  • Publisher Imprint: CRC Press
  • Publication Date:
  • Pages: 670
  • Original Price: GBP 130.0
  • Language: English
  • Edition: N/A
  • Item Weight: 2087 grams
  • BISAC Subject(s): Nanotechnology & MEMS, Electronics / Microelectronics, and Manufacturing

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

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