Advanced Metallization Conference 1999 (AMC 1999): Volume 15

Name: Advanced Metallization Conference 1999 (AMC 1999): Volume 15
Brand: Materials Research Society
SKU: 9781558995390
Price: 3134.0 INR
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by Mihal E. Gross , Thomas Gessner , N. Kobayashi

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ISBN13: 9781558995390
Binding: Hardcover
Subject: N/A
Publisher: Materials Research Society
Publisher Imprint: Materials Research Society
Publication Date: January 1, 2000
Pages: 763
Original Price: USD 29.99
Language: English
Edition: N/A
Item Weight: 1134 grams
BISAC Subject(s): Electronics / Circuits / General

About The Book

The revolution in materials and processes for IC metallization presents exciting challenges for the future. This book, the 16th in a popular series from MRS, provides a forum within the IC metallization community, across industrial, academic and government institutions, for presentation and discussion of leading-edge research, development and technology. In particular, the volume focuses on Cu and low-k dielectrics spanning materials, properties, processing, integration and reliability. Two keynote addresses are featured - one on 'The MARCO/DARPA Interconnect Focus Cente' a cooperative research program involving several top universities in the U.S. whose mission it is to explore new interconnect strategies for the future, the other on 'Low-Cost and High-Performance DRAM Technology'. Additional topics include: integration of damascene architectures; copper-deposition processes and properties; barriers for copper; low-k dielectrics; aluminum, tungsten and DRAM metallization; silicides; CMP/cleaning/etching; process modeling and reliability.

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