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Advanced Metallization Conference 2002 (AMC 2002): Volume 18 by Bradley M. Melnick, Timothy S. Cale, Shigeaki Zaima

Advanced Metallization Conference 2002 (AMC 2002): Volume 18

by Bradley M. Melnick , Timothy S. Cale , Shigeaki Zaima
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Book cover type: Hardcover
  • ISBN13: 9781558997196
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Materials Research Society
  • Publisher Imprint: Materials Research Society
  • Publication Date:
  • Pages: 882
  • Original Price: USD 29.99
  • Language: English
  • Edition: N/A
  • Item Weight: 1339 grams
  • BISAC Subject(s): Materials Science / General

Leading-edge metallization schemes inherently involve the introduction of novel metal systems and novel dielectric materials. Technological advances highlighted during AMC 2002 include the latest developments in integrating copper-based metallization with low-dielectric constant materials and in evaluating the reliability of such interconnects. For the second consecutive year, the volume takes a special look at the status of vertical integration, or 3D chips, and the promise it holds for high-density functional integration and heterogeneous integration. Technical leaders from around the world come together in this volume, the 18th in a popular series from the Materials Research Society, to offers a comprehensive overview of the current state of advanced metallization science and technologies. Topics include: advanced interconnects, 3D integration and packaging; CMP; reliability, test and characterization; metallization; integration; low-k/dielectric materials and characterization; atomic layer deposition (ALD) and barriers.

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