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Das Widerstands- Und Ultraschallschweißen ALS Verfahren Zum Verbinden Kleinster Bauelemente in Der Elektrotechnik by Friedrich Eichhorn

Das Widerstands- Und Ultraschallschweißen ALS Verfahren Zum Verbinden Kleinster Bauelemente in Der Elektrotechnik

by Friedrich Eichhorn
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Book cover type: Paperback
  • ISBN13: 9783531022932
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Vs Verlag Fur Sozialwissenschaften
  • Publisher Imprint: Vs Verlag Fur Sozialwissenschaften
  • Publication Date:
  • Pages: 110
  • Original Price: EUR 51.39
  • Language: German
  • Edition: 1972
  • Item Weight: 195 grams
  • BISAC Subject(s): Engineering (General)

Seit 1948, dem Jahr der Erfindung des Transistors und seiner bold darauf folgenden teehnischen EinfUhrung in die Elektronik, hot die Mikroelektro- nik eine groI3e industrielle Bedeutung erlangt. Die aus vielen Grilnden, z. B. Steigerung der Grenzfrequenz, Verringerung des Volumens, Gewichts- ersparnis und Steigerung der Zuverl ssigkeit, angestrebte Miniaturisierung der elektrisehen Sehaltelemente konnte mit Hil fe zwe ier Teehnologien, der "DUnnfilmteehnik" und der "Holbleitertechnik", entscheidend vorangetrieben werden. In der DUnnfilmteehnik werden auf isolierende Tr gerwerkstoffe wie Glas und Keramik naeh versehiedenen Verfahren MetalldUnnfilme von wenigen bis zu 10 tm Dieke vor allem aus den VJerkstoffen Cr, Cu, Ni, Ta, Ag und Au aufgebracht. Durch Atzen und Ausblenden mit Hilfe von Masken ent- stehen passive Sehaltelemente (Kondensatoren, Hiderstonde), die unter- einander dureh gut lei tende Lei terbahnen verbunden werden. Die uI3eren AnsehlUsse dieser DUnnfilmschaltkreise werden hergestellt dureh Dr hte, Flaehdrahte und B?nder, die mit den auBen auf dem Substrat liegenden An- sehluI3fl?che n versehweiBt werden. Die Herkstoffe d ieser DurchfUhrungen, die naeh dem VersehweiBen meist mit Kunststoff umgossen werden, sind vor- zugsweise Gold, Kupfer, Nickel und die Legierung Kovar. FUr die Ver- bindungsprobleme an DUnnfilmsehaltungen eignen sieh dos Hiderstandspunkt-, dos Ultrasehall-, dos ThermokompressionsschweiBen und einige Lotverfahren. In der Halbleiterteehnik werden die Bauelemente dureh Diffusion von ver- schiedenen Fremdatomen in einem Silizium-Einkristall meist mittels der Planar-Diffusionsteehnik hergestellt. Die elektrischen AnsehlUsse dieser aktiven Sehaltelemente (Transistoren, Dioden) werden von aufgedampften Aluminium-DUnnfilmstrukturen gebildet. Dos Kontaktieren, d. h.

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