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Fabrication Engineering at the Micro- And Nanoscale

by Stephen A. Campbell
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₹24,034.00
Original price ₹24,034.00
Original price ₹24,034.00
₹24,034.00
Current price ₹24,034.00

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Book cover type: Paperback
  • ISBN13: 9780199861224
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Oxford University Press
  • Publisher Imprint: Oxford University Press
  • Publication Date:
  • Pages: 688
  • Original Price: USD 229.99
  • Language: English
  • Edition: 4 Revised edition
  • Item Weight: 1075 grams
  • BISAC Subject(s): Electronics / Microelectronics

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.

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