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Niederdruckplasmen Und Mikrostrukturtechnik by Gerhard Franz

Niederdruckplasmen Und Mikrostrukturtechnik

by Gerhard Franz
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Book cover type: Paperback
  • ISBN13: 9783642622847
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 543
  • Original Price: EUR 102.79
  • Language: German
  • Edition: Softcover Repri
  • Item Weight: 781 grams
  • BISAC Subject(s): Optics

In diesem Buch werden zunächst die verschiedenen Typen von Plasmen ausführlich beschrieben: Gleichstrom-Entladung, kapazitive und induktive Kopplung mit Radiofrequenz, die magnetfeldunterstützte Anregung mittels Heliconwellen; schliesslich noch Ionenstrahlen. Breiten Raum nimmt dann die Plasmadiagnostik ein, die in einem separaten Kapitel mit vier Methoden exemplarisch vorgestellt wird. Daran anschliessend erfolgt eine umfassende Darstellung der beiden modernen Verfahren Sputtern und Trockenätzen, mit denen heute Oberflächen durch Beschichten und gezieltes Abtragen auf vielfältige Weise modifiziert werden. Besondere Aufmerksamkeit wird reaktiven Verfahren und den dort auftretenden Reaktionsmechanismen, aber auch der Ionenstrahlmethode, gewidmet. Zahlreiche Anwendungsbeispiele sind in den Text eingestreut. Für die Neuauflage wurde das Buch vollständig neu bearbeitet und aktualisiert. Hinzu kamen neue Kapitel über Plasmadiagnostik und hochdichte sowie induktiv-gekoppelte Plasmen.

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