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Run-to-Run Control in Semiconductor Manufacturing

by James Moyne , Enrique Del Castillo , Arnon M. Hurwitz
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₹26,219.00
Original price ₹26,219.00
Original price ₹26,219.00
₹26,219.00
Current price ₹26,219.00

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Book cover type: Hardcover
  • ISBN13: 9780849311789
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: CRC Press
  • Publisher Imprint: CRC Press
  • Publication Date:
  • Pages: 366
  • Original Price: GBP 210.0
  • Language: English
  • Edition: N/A
  • Item Weight: 617 grams
  • BISAC Subject(s): Electronics / Semiconductors

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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