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Silicon Carbide Microelectromechanical Systems for Harsh Environments

by Rebecca Cheung
Save 17% Save 17%
Current price ₹13,989.00
Original price ₹16,787.00
Original price ₹16,787.00
Original price ₹16,787.00
(-17%)
₹13,989.00
Current price ₹13,989.00

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Book cover type: Hardcover
  • ISBN13: 9781860946240
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Imperial College Press
  • Publisher Imprint: Imperial College Press
  • Publication Date:
  • Pages: 192
  • Original Price: GBP 98.0
  • Language: English
  • Edition: N/A
  • Item Weight: 490 grams
  • BISAC Subject(s): Nanotechnology & MEMS

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

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