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Investigation on Sige Selective Epitaxy for Source and Drain Engineering in 22 NM CMOS Technology Node and Beyond

Guilei Wang

Paperback

Current price ₹7,345
Original price ₹11,299
Original price ₹11,299
Original price ₹11,299
(-35%)
₹7,345
Current price ₹7,345

• Author(s): Guilei Wang • Publisher: Springer • Publisher Imprint: Springer • BISAC: Electronics - SemiconductorsThis thesis presents the SiGe source and drain (S/D) technology in the context of advanced CMOS, and addresses both device processin...

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