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Advanced Lithography by Burton Kohler

Advanced Lithography

by Burton Kohler
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Book cover type: Hardcover
  • ISBN13: 9781632380166
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: NY Research Press
  • Publisher Imprint: NY Research Press
  • Publication Date:
  • Pages: 260
  • Original Price: GBP 79.99
  • Language: English
  • Edition: N/A
  • Item Weight: 518 grams
  • BISAC Subject(s): Materials Science / General

This book presents state-of-the-art information regarding the extensive field of advanced lithography. Advanced lithography expands into numerous sub-fields like micro electro-mechanical system (MEMS), nano-lithography, nano-physics, etc. In optimized electron device, nano-lithography reaches up to 20 nm in size. Subsequently, we have to analyze and develop true single nanometer size lithography. One of the solutions is to analyze a fusion of bottom up and top down technologies like EB drawing and self-assembly with block copolymer. In nano-photonics and MEMS, 3D structures are required for carrying out specific functions in the devices for applications. They are formed as a result of execution of numerous techniques like stereo-lithography, sputtering, colloid lithography, deposition, dry etching, etc. This book provides the readers with valuable information about nano structure, 3D structure, nano-lithography, and elucidates the methodology, techniques and applications of nano-lithography.

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