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CMOS Gate-Stack Scaling Materials, Interfaces and Reliability Implications: Volume 1155

by Alexander A. Demkov , Bill Taylor , H. Rusty Harris
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Current price ₹3,450.00
Original price ₹3,510.00
Original price ₹3,510.00
Original price ₹3,510.00
(-2%)
₹3,450.00
Current price ₹3,450.00

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Book cover type: Paperback
  • ISBN13: 9781107408326
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Cambridge University Press
  • Publisher Imprint: Cambridge University Press
  • Publication Date:
  • Pages: 194
  • Original Price: GBP 27.0
  • Language: English
  • Edition: N/A
  • Item Weight: 268 grams
  • BISAC Subject(s): Materials Science / General

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

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