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Design a Ring HDP Semiconductor Plasma dry etcher by Kung Linliu

Design a Ring HDP Semiconductor Plasma dry etcher

by Kung Linliu
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Book cover type: Paperback
  • ISBN13: 9798560791438
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Independently Published
  • Publisher Imprint: Independently Published
  • Publication Date:
  • Pages: 138
  • Original Price: USD 99.99
  • Language: English
  • Edition: N/A
  • Item Weight: 195 grams
  • BISAC Subject(s): Lasers & Photonics

A special shape of cylinder metal roller is designed for the truly seamless anti-fake product. And it is manufactured by the traditional lithography and electroforming process. However, it is suffered by the complex manufacturing procedure and complicated chemical parameters then the yield rate is not as expected from the original designing concept.In order to overcome the difficulties of the manufacturing procedures, the novel concept of ring shape HDP plasma dry etching of metal roller from semiconductor IC process is proposed and applied to patent.

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