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Doping Engineering for Front-End Processing by B. J. Pawlak, M. L. Pelaz, M. Law

Doping Engineering for Front-End Processing

by B. J. Pawlak , M. L. Pelaz , M. Law
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Book cover type: Hardcover
  • ISBN13: 9781605110400
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Cambridge University Press
  • Publisher Imprint: Cambridge University Press
  • Publication Date:
  • Pages: 336
  • Original Price: USD 103.0
  • Language: English
  • Edition: N/A
  • Item Weight: 567 grams
  • BISAC Subject(s): Materials Science / General

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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