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Euv Lithography

by Vivek Bakshi
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Current price ₹13,633.00
Original price ₹14,402.00
Original price ₹14,402.00
Original price ₹14,402.00
(-5%)
₹13,633.00
Current price ₹13,633.00

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Book cover type: Hardcover
  • ISBN13: 9780470471555
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Wiley
  • Publisher Imprint: Wiley
  • Publication Date:
  • Pages: 700
  • Original Price: USD 146.95
  • Language: English
  • Edition: N/A
  • Item Weight: 1556 grams
  • BISAC Subject(s): Electronics / Circuits / General and Electronics / Semiconductors

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Vivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc.
Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.

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