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Excimer Laser Technology by Dirk Basting

Excimer Laser Technology

by Dirk Basting
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Book cover type: Hardcover
  • ISBN13: 9783540200567
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 433
  • Original Price: EUR 279.99
  • Language: English
  • Edition: 2005
  • Item Weight: 867 grams
  • BISAC Subject(s): Physics / General, Physics / Optics & Light, and Lasers & Photonics

From the Back Cover

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.

Additional chapters on optics, devices and laser systems complete this compact handbook.

A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.

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