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Fabrication and Design of Resonant Microdevices by Behraad Bahreyni

Fabrication and Design of Resonant Microdevices

by Behraad Bahreyni
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Book cover type: Hardcover
  • ISBN13: 9780815515777
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: William Andrew
  • Publisher Imprint: William Andrew
  • Publication Date:
  • Pages: 250
  • Original Price: USD 195.0
  • Language: English
  • Edition: N/A
  • Item Weight: 567 grams
  • BISAC Subject(s): Engineering (General), Nanotechnology & MEMS, and Mechanical

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

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