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Fabrication of GAAS Devices by Albert G. Baca

Fabrication of GAAS Devices

by Albert G. Baca
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Book cover type: Paperback
  • ISBN13: 9781849190671
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Institute of Electrical Engineers of Japan
  • Publisher Imprint: Institute of Electrical Engineers of Japan
  • Publication Date:
  • Pages: 370
  • Original Price: GBP 104.0
  • Language: English
  • Edition: N/A
  • Item Weight: 658 grams
  • BISAC Subject(s): Electronics / Semiconductors

This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.

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