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Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices

by Eric Garfunkel , Evgeni Gusev , Alexander Vul'
Save 17% Save 17%
Current price ₹16,516.00
Original price ₹19,820.00
Original price ₹19,820.00
Original price ₹19,820.00
(-17%)
₹16,516.00
Current price ₹16,516.00

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Book cover type: Paperback
  • ISBN13: 9780792350088
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 507
  • Original Price: GBP 129.99
  • Language: English
  • Edition: Softcover Repri
  • Item Weight: 722 grams
  • BISAC Subject(s): Electronics / Semiconductors

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

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