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Handbook of Silicon Semiconductor Metrology by Alain C. Diebold

Handbook of Silicon Semiconductor Metrology

by Alain C. Diebold
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Book cover type: Hardcover
  • ISBN13: 9780824705060
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: CRC Press
  • Publisher Imprint: CRC Press
  • Publication Date:
  • Pages: 894
  • Original Price: GBP 520.0
  • Language: English
  • Edition: N/A
  • Item Weight: 1692 grams
  • BISAC Subject(s): Electronics / Semiconductors

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

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