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Handbook of Silicon Wafer Cleaning Technology by Karen Reinhardt

Handbook of Silicon Wafer Cleaning Technology

by Karen Reinhardt , Werner Kern
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Book cover type: Paperback
  • ISBN13: 9780815515548
  • Binding: Paperback
  • Subject: N/A
  • Publisher: William Andrew
  • Publisher Imprint: William Andrew
  • Publication Date:
  • Pages: 748
  • Original Price: USD 310.0
  • Language: English
  • Edition: 2nd Edition
  • Item Weight: 1139 grams
  • BISAC Subject(s): Electronics / Semiconductors

Intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits, this handbook discusses both wet and plasma-based cleaning technologies that are used for removing contamination, particles, r

Reinhardt, Karen: - Karen A. Reinhardt is Principle Consultant at Cameo Consulting in San Jose, California. At Cameo Consulting she assists companies investigating and assessing new and unique cleaning technologies that will allow realization of the ITRS roadmap with respect to smaller geometries, new materials, and the environmental issues associated with current cleaning processes. Karen has published over 30 technical papers ranging from plasma processing to damage characterization and cleaning technology assessment. She has been awarded eight patents. Karen formerly co-chaired the ITRS Surface Preparation Technical Working Group. Prior to forming a contracting and consulting company, Karen was employed at Novellus Systems and Advanced Micro Devices. Karen has a BS degree in Chemistry from the University of California at Riverside and a MS degree in Inorganic Chemistry from Texas Tech University.

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