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Ion Sources

by Huashun Zhang
Save 35% Save 35%
Current price ₹15,987.00
Original price ₹24,595.00
Original price ₹24,595.00
Original price ₹24,595.00
(-35%)
₹15,987.00
Current price ₹15,987.00

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Book cover type: Hardcover
  • ISBN13: 9783540657477
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 476
  • Original Price: EUR 219.99
  • Language: English
  • Edition: 1999
  • Item Weight: 871 grams
  • BISAC Subject(s): Physics / Nuclear and Physics / General

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

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