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Ionenimplantation by Heiner Ryssel, Ingolf Ruge

Ionenimplantation

by Heiner Ryssel , Ingolf Ruge
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Book cover type: Paperback
  • ISBN13: 9783519032069
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Vieweg+teubner Verlag
  • Publisher Imprint: Vieweg+teubner Verlag
  • Publication Date:
  • Pages: 366
  • Original Price: EUR 60.74
  • Language: German
  • Edition: Softcover Repri
  • Item Weight: 586 grams
  • BISAC Subject(s): Engineering (General)

In den letzten Jahren erschienen bereits mehrere Bücher zum Thema Ionenimplanta- tion, die sich fast ausschlie lich an auf dem Gebiet der Ionenimplantation tätige Wissenschaftler wenden und deshalb der Theorie einen sehr breiten Raum einräumen. Im Gegensatz hierzu wendet sich das vorliegende Werk weniger an den Implanta- tionsfachmann, sondern mehr an Forscher und Entwickler in Industrie, F or- schungslaboratorien und Hochschulen, die an der Ionenimplantation als neuem Hilfsmittel zur Veränderung von Materialeigenschaften interessiert sind und wissen wollen, ob die Ionenimplantation für ihr Problem anwendbar ist. Bei einer solchen Ausrichtung mu deshalb nach unserer Meinung neben einem kurzen Abri der theoretischen Grundlagen vor allem die Behandlung von Problemen bei der Anwendung der Implantation im Vordergrund der Darstellung stehen, wovon hier zum Beispiel genannt seien die elektrische Aktivierung implantierter Ionen, Diffusionseffekte sowie die Diskussion der hauptsächlich verwendeten Me - methoden zur Untersuchung implantierter Schichten, die apparativen Anforderungen an Beschleunigungssysteme und natürlich zahlreiche Beispiele zur Anwendung der Ionenimplantation. Die Schwerpunkte des Buches liegen bei der Dotierung von Halbleitern durch Ionenimplantation, da dies zur Zeit und wahrscheinlich noch sehr lange ihre Hauptanwendung sein wird; dennoch wird von Fall zu Fall auf die weiteren Möglich- keiten der Implantation eingegangen.

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