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Le transistor cmos: la course vers le nanomonde... by Collectif

Le transistor cmos: la course vers le nanomonde...

by Collectif
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Book cover type: Paperback
  • ISBN13: 9786131548055
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Univ Europeenne
  • Publisher Imprint: Univ Europeenne
  • Publication Date:
  • Pages: 280
  • Original Price: GBP 67.0
  • Language: French
  • Edition: N/A
  • Item Weight: 413 grams
  • BISAC Subject(s): Physics / General

Ce travail de th�se est constitu� de deux grandes parties. Dans la premi�re partie, nous avons �tudi� la redistribution du B dans le Si(001), � l''ambiante et apr�s recuit thermique, � l''aide principalement de la sonde atomique tomographique. Pour cette �tude, le Si a �t� fortement dop� en B. La concentration en B dans le Si peut alors d�passer la limite de solubilit�. On est donc dans le cas d''un syst�me sursatur�. Dans ce cas, nous avons observ� qu''� la formation de d�fauts (BIC''s, etc...) s''ajoute la germination d''amas riches en B ou m�me la pr�cipitation d''une nouvelle phase apr�s recuit thermique. Dans la deuxi�me partie, nous avons �tudi� la redistribution du B et du Pt dans le NiSi, utilis� lors de la miniaturisation des transistors MOS, afin de r�duire la r�sistance de contact. A part l''accumulation du B � l''interface NiSi/Si et � la surface de NiSi, nous avons observ�, la pr�cipitation du B dans le monosiliciure de Ni, pour un recuit � 450 C. En revanche, pour le Pt nous n''observons plus un ph�nom�ne de pr�cipitation. Il a plut�t tendance de s�gr�ger aux interfaces � 290 C (ph�nom�ne de "chasse-neige "), tandis qu''au del� de 350 C, le Pt s''accumule plutot dans la phase NiSi.

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