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Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology

by F. H. P. M. Habraken
Save 35% Save 35%
Current price ₹3,672.00
Original price ₹5,649.00
Original price ₹5,649.00
Original price ₹5,649.00
(-35%)
₹3,672.00
Current price ₹3,672.00

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Book cover type: Paperback
  • ISBN13: 9783540539544
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Publication Date:
  • Pages: 159
  • Original Price: EUR 49.99
  • Language: English
  • Edition: Softcover Repri
  • Item Weight: 307 grams
  • BISAC Subject(s): Electronics / Microelectronics, Chemistry / Inorganic, and Materials Science / Thin Films, Surfaces & Interfaces

This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.

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