Mesure de Charges Dans Les Matériaux Semi-Conducteurs Et Les Métaux
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Les matériaux semi-conducteurs sont très utilisés, notamment dans le domaine de l'électronique. Pourtant leur fonctionnement intime reste mal connu du fait du manque de techniques de mesures directes de leur distributions de charges. Les distributions de charges, qui sont à la base des propriétés électriques du matériau, sont en effet encore déterminées à l'aide de modèles et de mesures électriques globales ou destructives. Ainsi les nouveaux matériaux, sans modèle éprouvé, sont difficiles à analyser. L'utilisation d'un couplage élasto-électrique local permettrait de palier à ce problème et ainsi de faciliter l'analyse des nouveaux matériaux pour la micro-électronique. Ce couplage agit en effet directement sur les charges à mesurer de manière non destructive. Dans ce livre le couplage élasto-électrique est modélisé dans des structures à semi-conducteurs et des métaux. Le signal induit par la propagation d'une onde élastique est calculé analytiquement ou numériquement selon la situation de la structure testée. Les résultats analytiques et numériques sont validés par des mesures expérimentales appliquées à différentes structures en variant les paramètres de mesure.
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