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Micro Electronic and Mechanical Systems

by Kenichi Takahata
Save 13% Save 13%
Current price ₹17,414.00
Original price ₹20,090.00
Original price ₹20,090.00
Original price ₹20,090.00
(-13%)
₹17,414.00
Current price ₹17,414.00

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Book cover type: Hardcover
  • ISBN13: 9789533070278
  • Binding: Hardcover
  • Subject: N/A
  • Publisher: Intechopen
  • Publisher Imprint: Intechopen
  • Publication Date:
  • Pages: 528
  • Original Price: USD 205.0
  • Language: English
  • Edition: N/A
  • Item Weight: 1035 grams
  • BISAC Subject(s): Electronics / General

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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