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Microengineering, MEMS, and Interfacing: A Practical Guide by Danny Banks

Microengineering, MEMS, and Interfacing: A Practical Guide

by Danny Banks
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Book cover type: Paperback
  • ISBN13: 9780367391027
  • Binding: Paperback
  • Subject: N/A
  • Publisher: Taylor & Francis
  • Publisher Imprint: CRC Press
  • Publication Date:
  • Pages: 352
  • Original Price: GBP 72.99
  • Language: English
  • Edition: N/A
  • Item Weight: 658 grams
  • BISAC Subject(s): Mechanical, Electronics / Microelectronics, and Civil / General

Designed to address particular problems across a range of disciplines, Microengineering, MEMS, and Interfacing: A Practical Guide provides a general overview of micromachining techniques and presents micromachining approaches to problem solving. The author outlines techniques for micromachining materials, including silicon, metals, and polymers, and then illustrates how to combine these technologies to create a variety of structures and devices. He also includes discussions on nanotechnology and how it overlaps with microengineering, introduces the subject of sensor interfacing, and raises the tricky subject of MEMS packaging.

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